The HWFB5 gas mass flow sensor is made of micro-electro-mechanical system (MEMS) flow sensing chips. It is suitable for a wide range of clean and relatively dry gas flow measurement and process control. Unique packaging technology enables the product to meet a wide range of flow measurement, ensuring high sensitivity, high reliability, high stability and low cost. The HWFB5 is based on MEMS flow sensing unit and high precision digital processing and calibration circuit (MCU). The integrated DELta-sigma A/D converter and the logic circuit with internal calibration function and MCU processor ensure that the sensor signal is collected effectively in real time to obtain accurate flow signal, and the corresponding compensation algorithm is processed internally, so that no external calibration compensation is required to ensure high precision flow output. Friendly digital output communication form, users can be very convenient to get the corresponding data information for communication; The product application scope is very broad.